Apparatus measuring substrate leakage current and surface...

Details Apparatus measuring substrate leakage current and surface... Apparatus measuring substrate leakage current and surface...

2006-01-31

2008-03-04

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750010, C324S754120

Reexamination Certificate

active

07339392

ABSTRACT:
An apparatus and related method for testing a semiconductor device are provided. The apparatus includes a unit depositing charge on an insulating layer formed on a semiconductor substrate, a unit measuring leakage current from the bottom surface of the semiconductor substrate, and a unit measuring surface voltage associated with the insulating layer.

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patent: 6522158 (2003-02-01), Fung et al.
patent: 6597193 (2003-07-01), Lagowski et al.
patent: 7064565 (2006-06-01), Xu et al.
patent: 2004288980 (2004-10-01), None

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