Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor
Reexamination Certificate
2006-12-19
2008-09-30
Neckel, Alexa (Department: 1795)
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
C392S386000, C392S388000, C392S389000, C392S390000, C422S228000, C422S232000, C422S198000
Reexamination Certificate
active
07429361
ABSTRACT:
In one embodiment, an apparatus for generating a gaseous chemical precursor used in a vapor deposition processing system is provided which includes a canister comprising a sidewall, a top, and a bottom encompassing an interior volume therein, an inlet port and an outlet port in fluid communication with the interior volume, and an inlet tube extending from the inlet port into the canister. The apparatus further may contain a plurality of baffles within the interior volume extending between the top and the bottom of the canister, and a precursor slurry contained within the interior volume, wherein the precursor slurry contains a solid precursor material and a thermally conductive material that is unreactive towards the solid precursor material. In one example, the solid precursor material solid precursor material is pentakis(dimethylamino) tantalum.
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Chen Ling
Ganguli Seshadri
Ku Vincent W.
Applied Materials Inc.
Handal Kaity V.
Neckel Alexa
Patterson & Sheridan LLP
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