Line width error check

Details Line width error check Line width error check

2004-02-19

2008-09-23

Chiang, Jack (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000

Reexamination Certificate

active

07428714

ABSTRACT:
A method of checking for errors in line width in an integrated circuit includes identifying with a marker any lines having a line width greater than a minimum line width, and associating a line width parameter with each line width marker, the line width parameter corresponding to a line width for the marked line. The line width parameters for each line width marker are compared to the actual layout line width.

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