Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2006-11-06
2008-07-22
Barlow, Jr., John E (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
Reexamination Certificate
active
07403864
ABSTRACT:
A centrally-controlled correlation system for testing a correlation wafer and comparing the testing results with the wafer's reference data that has been determined previously. The testing instructions and the correlation criteria are stored and transmitted from a central database. Such centrally-controlled correlation system improves the reliability of the correlation results and reduces the time to correlate a correlation wafer.
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Hsieh Chung-Lin
Huo Hsing Ya
Lee Tsung-Yu
Yen-Ni Yang
Baker & McKenzie LLP
Barlow Jr. John E
Khuu Cindy H
Taiwan Semiconductor Manufacturing Company , Ltd.
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