Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Reexamination Certificate
2004-10-22
2008-03-25
Yu, Mickey (Department: 3728)
Special receptacle or package
Holder for a removable electrical component
For a semiconductor wafer
C206S710000, C206S832000, C206S722000, C016S422000, C016S425000, C220S756000, C220S759000, C220S768000, C220S772000
Reexamination Certificate
active
07347329
ABSTRACT:
A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
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Burns John
Forbes Martin L.
Fuller Matthew A.
King Jeffery J.
Smith Mark V.
Entegris, Inc.
Pollicoff Steven
Yu Mickey
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