Ultrasonic cleaning device

Details Ultrasonic cleaning device Ultrasonic cleaning device

1997-08-29

1999-06-15

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

134 13, 310317, B08B 312

Patent

active

059112328

ABSTRACT:
Disclosed is an ultrasonic cleaning device including a cleaning tank containing a semiconductor wafer W and pure water, and a plurality of vibrating plates provided with the cleaning tank. The vibrating plates are electric distortion transducers. By controlling the output phases of oscillators that vibrate the plates with a single oscillating source, the output phases of the oscillation sources can be matched. This enables uniform sound pressure distribution. Consequently, ultrasonic interference between vibrating plates can be eliminated. Uniform sound pressure distribution makes it possible to obtain a uniform particle removal rate, thereby improving cleaning efficiency.

REFERENCES:
patent: 2891176 (1959-06-01), Branson

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