Methods and devices for enhancing bonded substrate yields...

Details Methods and devices for enhancing bonded substrate yields... Methods and devices for enhancing bonded substrate yields...

2008-04-01

2008-04-01

Gordon, Brian R. (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C422S091000, C422S105000, C422S051000

Reexamination Certificate

active

09884429

ABSTRACT:
Methods and devices that include the use of venting elements for enhancing bonded substrate yields and regulating temperature. Venting elements are generally fabricated proximal to functionalized regions in substrate surfaces to prevent bond voids that form during bonding processes from affecting the functionalized regions. Venting elements generally include venting channels or networks of channels and/or venting cavities.

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