Optical component that includes a material having a thermal...

Details Optical component that includes a material having a thermal... Optical component that includes a material having a thermal...

2008-09-23

2008-09-23

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C355S071000, C378S034000, C378S035000

Reexamination Certificate

active

11042779

ABSTRACT:
There is provided an optical component. The optical component includes a material having a surface that heats to a maximum temperature (Tmax) when subjected to radiation. The material has a temperature-dependent coefficient of thermal expansion (α(T)) of about zero at a temperature T0that is approximately equal to Tmax. The optical component is suitable for use in any of an illumination system, a projection objective or a projection exposure system, as employed, for example, for EUV microlithography.

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