Method of manufacturing external force detection sensor

Details Method of manufacturing external force detection sensor Method of manufacturing external force detection sensor

2008-07-01

2008-07-01

Smith, Matthew S. (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S456000, C438S459000, C438S700000, C438S740000

Reexamination Certificate

active

11296052

ABSTRACT:
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole dry etching of an element substrate, and an electrically conductive material is used as an etching stop layer during the dry etching.

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