Charged-particle beam instrument and method of detection

Details Charged-particle beam instrument and method of detection Charged-particle beam instrument and method of detection

2008-04-01

2008-04-01

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S309000, C250S311000, C250S3960ML, C250S3960ML, C250S397000, C250S492200, C250S492300

Reexamination Certificate

active

11479975

ABSTRACT:
A charged-particle beam instrument and method are offered which can inspect side and rear surfaces of the outer periphery of a specimen. The instrument has a source of the charged-particle beam and an objective lens for focusing the beam onto the specimen positioned inside a specimen chamber. The instrument further includes an electrostatic electrode and a deflection voltage power supply for applying a deflection voltage to the electrostatic electrode located on a downstream side of the objective lens. The electrostatic electrode reflects or deflects the beam passed through the objective lens such that the beam is directed at the specimen.

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