Polymerizable compositions; polymer, resist, and lithography...

Details Polymerizable compositions; polymer, resist, and lithography... Polymerizable compositions; polymer, resist, and lithography...

2008-05-20

2008-05-20

Visconti, Geraldina (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S311000, C430S322000, C528S038000

Reexamination Certificate

active

10520534

ABSTRACT:
A polymerizable composition for the production of a resist includes at least one unsaturated, polymerizable monomer. This monomer has at least one silicon atom and at least one carbonyl group.

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