Insulating film and electronic device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S411000, C257SE21625

Reexamination Certificate

active

11347244

ABSTRACT:
An insulating film comprising: a first barrier layer; a well layer provided; and a second barrier layer is proposed. The first barrier layer consists of a material having a first bandgap and a first relative permittivity. The well layer is provided on the first barrier layer, and consists of a material having a second bandgap smaller than the first bandgap and having a second relative permittivity larger than first relative permittivity. Discrete energy levels are formed in the well layer by a quantum effect. The second barrier layer is provided on the well layer, and consists of a material having a third bandgap larger than the second bandgap and having a third relative permittivity smaller than second relative permittivity. Alternatively, an insulating film comprising: n (n being an integer larger than 2) layers of barrier layer consisting of a material having a bandgap larger than a first bandgap and having a relative permittivity smaller than a first relative permittivity; and (n−1) layers of well layers consisting of a material having a bandgap smaller than the first bandgap and having a relative permittivity larger than the first relative permittivity, discrete energy levels being formed in the well layer by a quantum effect, each of the barrier layers and each of the well layers being stacked by turns, and discrete energy levels being formed in each of the well layers by a quantum effect, is provided. Alternatively, an insulating film having a lattice mismatch within a range of plus-or-minus 1.5% to the substrate, and further having a high barrier and a large permittivity is provided.

REFERENCES:
patent: 6407435 (2002-06-01), Ma et al.
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patent: 2004-511909 (2004-04-01), None
patent: WO 02/31875 (2002-04-01), None
J. H. Haeni, et al., “Epitaxial Growth of the First Five Members of the Srn+1TinO3n+ 1Ruddlesden-Popper Homologous Series” Applied Physics Letters, vol. 78, No. 21, May 21, 2001, pp. 3292-3294.
R.A. McKee, et al., “Physical Structure and Inversion Charge at a Semiconductor Interface With A Crystalline Oxide”, Science, vol. 293, Jul. 20, 2001, pp. 468-471.

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