Semiconductor wafer processing apparatus and method for...

Details Semiconductor wafer processing apparatus and method for... Semiconductor wafer processing apparatus and method for...

2008-04-01

2008-04-01

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S100000, C700S108000, C702S083000, C707S793000, C707S793000

Reexamination Certificate

active

11474385

ABSTRACT:
Disclosed is a semiconductor processing apparatus for processing batches of wafers with variable numbers of wafer lots. The apparatus includes an operator interface server adapted to receive batch information for a track-in operation, an equipment management server adapted to store data used to process the batch of wafers, and a device interface server adapted to control a selected unit of processing equipment used to process the batch of wafers. The batch information is transmitted from the operator interface server to the device interface server, and the device interface server attempts to set a sub-recipe in the selected unit of processing equipment based on the batch information. After the sub-recipe is set in the selected unit of processing equipment, the device interface server then attempts to set a process recipe in the device interface server.

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