Hybrid cantilever and tip

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive

Reexamination Certificate

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C438S425000

Reexamination Certificate

active

10915571

ABSTRACT:
A storage device having a read/write mechanism including a cantilever portion. The cantilever portion includes a non-single-crystal silicon body portion and a single crystal silicon tip.

REFERENCES:
patent: 5021364 (1991-06-01), Akamine et al.
patent: 5066358 (1991-11-01), Quate et al.
patent: 5811017 (1998-09-01), Matsuyama
patent: 5936237 (1999-08-01), van der Weide
patent: 5959957 (1999-09-01), Ikeda et al.
patent: 6277703 (2001-08-01), Barlocchi et al.

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