Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-02-13
2007-02-13
Barnes, Crystal J. (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S101000, C700S115000, C700S121000, C700S228000, C414S222010
Reexamination Certificate
active
11067311
ABSTRACT:
Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots to be processed is determined and an equivalent number of carrier storage locations are reserved at a substrate loading station of a processing tool. The number of reserved carrier storage locations are made available either by processing and advancing occupying non-priority lots and/or moving unprocessed occupying non-priority lots from the substrate loading station. Priority lots are then transferred to the reserved carrier storage locations. Other embodiments are provided.
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Duffin David C.
Jessop Daniel R.
Puri Amitabh
Teferra Michael
Warner Glade L.
Applied Materials Inc.
Barnes Crystal J.
Dugan & Dugan
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