Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-06-26
2007-06-26
Gilliam, Barbara L. (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S921000
Reexamination Certificate
active
10842719
ABSTRACT:
Photoacid generators have formula (1) wherein R1and R2are alkyl, or R1and R2, taken together, may form a C4–C6ring structure with sulfur, R is hydrogen or alkyl, R′ is hydrogen, alkyl, alkoxyl or nitro, n is 1 to 6, and Y−is alkylsulfonate, arylsulfonate, bisalkylsulfonylimide or trisalkylsulfonylmethide. Chemically amplified resist compositions comprising the same have improved resolution, thermal stability, storage stability and minimized line edge roughness
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Kaneko Tatsushi
Kobayashi Katsuhiro
Ohsawa Youichi
Gilliam Barbara L.
Shin-Etsu Chemical Co. , Ltd.
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