Structurally-stabilized capacitors and method of making of same

Details Structurally-stabilized capacitors and method of making of same Structurally-stabilized capacitors and method of making of same

2007-10-16

2007-10-16

Pham, Hoai (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S303000, C257S306000, C257SE27086

Reexamination Certificate

active

10665151

ABSTRACT:
Structurally-stable, tall capacitors having unique three-dimensional architectures for semiconductor devices are disclosed. The capacitors include monolithically-fabricated upright microstructures, i.e., those having large height/width (H/W) ratios, which are mechanical reinforcement against shear forces and the like, by a brace layer that transversely extends between lateral sides of at least two of the free-standing microstructures. The brace layer is formed as a microbridge type structure spanning between the upper ends of the two or more microstructures.

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