Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-06-05
2007-06-05
Lee, Calvin (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C438S527000
Reexamination Certificate
active
10997250
ABSTRACT:
The process for manufacturing a through insulated interconnection is performed by forming, in a body of semiconductor material, a trench extending from the front (of the body for a thickness portion thereof; filling the trench with dielectric material; thinning the body starting from the rear until the trench, so as to form an insulated region surrounded by dielectric material; and forming a conductive region extending inside said insulated region between the front and the rear of the body and having a higher conductivity than the first body. The conductive region includes a metal region extending in an opening formed inside the insulated region or of a heavily doped semiconductor region, made prior to filling of the trench.
REFERENCES:
patent: 3761782 (1973-09-01), Youmans
patent: 4978639 (1990-12-01), Hua et al.
patent: 5091331 (1992-02-01), Delgado et al.
patent: 5272104 (1993-12-01), Schrantz et al.
patent: 5352926 (1994-10-01), Andrews
patent: 5426072 (1995-06-01), Finnila
patent: 5447871 (1995-09-01), Goldstein
patent: 5753529 (1998-05-01), Chang et al.
patent: 5757081 (1998-05-01), Chang et al.
patent: 6313531 (2001-11-01), Geusic et al.
patent: 198 16 245 (1999-10-01), None
patent: 0 926 726 (1999-06-01), None
patent: 0 974 817 (2000-01-01), None
patent: 1 071 126 (2001-01-01), None
patent: 1 151 962 (2001-11-01), None
patent: 02 42 5207 (2003-11-01), None
patent: 2 805 709 (2001-08-01), None
patent: PCT/US95/05217 (1995-11-01), None
Ferrari Paolo
Mastromatteo Ubaldo
Graybeal Jackson Haley LLP
Jorgenson Lisa K.
Lee Calvin
Santarelli Bryan A.
STMicroelectronics S.R.L.
LandOfFree
Process for manufacturing a through insulated... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for manufacturing a through insulated..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for manufacturing a through insulated... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3882973