Multi-cell masks and methods and apparatus for using such...

Details Multi-cell masks and methods and apparatus for using such... Multi-cell masks and methods and apparatus for using such...

2007-06-26

2007-06-26

Nguyen, Nam (Department: 1753)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating selected area

C205S122000

Reexamination Certificate

active

10677498

ABSTRACT:
Multilayer structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. Selectivity of deposition is obtained via a multi-cell controllable mask. Alternatively, net selective deposition is obtained via a blanket deposition and a selective removal of material via a multi-cell mask. Individual cells of the mask may contain electrodes comprising depositable material or electrodes capable of receiving etched material from a substrate. Alternatively, individual cells may include passages that allow or inhibit ion flow between a substrate and an external electrode and that include electrodes or other control elements that can be used to selectively allow or inhibit ion flow and thus inhibit significant deposition or etching. Single cell masks having a cell size that is smaller or equal to the desired deposition resolution may also be used to form structures.

REFERENCES:
patent: 6027630 (2000-02-01), Cohen
patent: 6468806 (2002-10-01), McFarland et al.

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