Probe current imaging

Details Probe current imaging Probe current imaging

2007-10-23

2007-10-23

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S309000, C250S311000, C250S442110

Reexamination Certificate

active

11063692

ABSTRACT:
A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.

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