MEMS microphone

Details MEMS microphone MEMS microphone

2007-11-27

2007-11-27

Huynh, Andy (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S416000, C257S419000

Reexamination Certificate

active

10909190

ABSTRACT:
The sensitivity of a MEMS microphone is substantially increased by using a portion of the package that holds the MEMS microphone as the diaphragm or a part of the diaphragm. As a result, the diaphragm of the present invention is substantially larger, and thus more sensitive, than the diaphragm in a comparably-sized MEMS microphone die.

REFERENCES:
patent: 2005/0218488 (2005-10-01), Matsuo
Karl Behringer, University of Washington, “EE 539 TM/M(S)E 599 TM, Lecture B2, Micro/Nano/MEMS”, Spring 2003, [online], [retrieved on Jun. 28, 2004]. Retrieved from the Internet: <URL:http://courses.washington.edu/mengr599/tm—taya
otes/b2.pdf>. pp. 1-10 (unnumbered).
“Microphones”, [online], [retrieved on Jun. 8, 2004]. Retrieved from the Internet: <URL:http://hyperphysics.phy-astr.gsu.edu/hbase/audio/mic3.html>. pp. 1-5.

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