Multilayer photoresist system

Details Multilayer photoresist system Multilayer photoresist system

2007-12-11

2007-12-11

Schilling, Richard L. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S325000

Reexamination Certificate

active

10718487

ABSTRACT:
Multilayer photoresist systems are provided. In particular aspects, the invention relates to underlayer composition for an overcoated photoresist, particularly an overcoated silicon-containing photoresist that is imaged at short exposure wavelengths.

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