Capacitive dynamic quantity sensor and semiconductor device

Details Capacitive dynamic quantity sensor and semiconductor device Capacitive dynamic quantity sensor and semiconductor device

2007-11-13

2007-11-13

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S254000, C257S595000, C257S600000, C257S602000, C257S700000

Reexamination Certificate

active

11099163

ABSTRACT:
A capacitive dynamic quantity sensor whose size is small and whose reliability and mass productivity are high is provided. In order to realize signal transmission from a lower electrode to an upper electrode, silicon columns which are electrically isolated from one another but not mechanically isolated from one another are formed to connect both electrodes.

REFERENCES:
patent: 5296730 (1994-03-01), Takano et al.
patent: 6215318 (2001-04-01), Schoefthaler et al.

Affiliated with

Also associated with

Rating

Capacitive dynamic quantity sensor and semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive dynamic quantity sensor and semiconductor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive dynamic quantity sensor and semiconductor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3823512