Laser irradiation apparatus

Details Laser irradiation apparatus Laser irradiation apparatus

2007-11-13

2007-11-13

Lebentritt, Michael B. (Department: 2812)

Semiconductor device manufacturing: process

Radiation or energy treatment modifying properties of...

C257SE21347

Reexamination Certificate

active

10136374

ABSTRACT:
An object is to obtain an even energy distribution of a laser beam in one direction, thereby conducting a uniform laser annealing on a film.A laser irradiation apparatus comprising: a lens for dividing a laser beam in one direction; and an optical system for overlapping the divided laser beam, characterized in that the shape of the laser beam entering into the lens has edges vertical to the above-mentioned direction.

REFERENCES:
patent: 3670260 (1972-06-01), Koester et al.
patent: 4262208 (1981-04-01), Suzki et al.
patent: 4734550 (1988-03-01), Imamura et al.
patent: 4851978 (1989-07-01), Ichihara
patent: 4861964 (1989-08-01), Sinohara
patent: 4937459 (1990-06-01), Ina
patent: 4942588 (1990-07-01), Yasui et al.
patent: 5059013 (1991-10-01), Jain
patent: 5062942 (1991-11-01), Kambara et al.
patent: RE33947 (1992-06-01), Shinohara
patent: 5548444 (1996-08-01), McLaughlin et al.
patent: 5561081 (1996-10-01), Takenouchi et al.
patent: 5591668 (1997-01-01), Maegawa et al.
patent: 5608492 (1997-03-01), Sato
patent: 5643826 (1997-07-01), Ohtani et al.
patent: 5708252 (1998-01-01), Shinohra et al.
patent: 5721416 (1998-02-01), Burghardt et al.
patent: 5798784 (1998-08-01), Nonaka et al.
patent: 5815494 (1998-09-01), Yamazaki et al.
patent: 5858473 (1999-01-01), Yamazaki et al.
patent: 5858822 (1999-01-01), Yamazaki et al.
patent: 5879977 (1999-03-01), Zhang et al.
patent: 5897799 (1999-04-01), Yamazaki et al.
patent: 5900980 (1999-05-01), Yamazaki et al.
patent: 5923960 (1999-07-01), Harvey
patent: 5923962 (1999-07-01), Ohtani et al.
patent: 5959779 (1999-09-01), Yamazaki et al.
patent: 5968383 (1999-10-01), Yamazaki et al.
patent: 6002101 (1999-12-01), Yamazaki et al.
patent: 6002523 (1999-12-01), Tanaka
patent: 6008144 (1999-12-01), Shih et al.
patent: 6038075 (2000-03-01), Yamazaki et al.
patent: 6061375 (2000-05-01), Zhang et al.
patent: 6071765 (2000-06-01), Noguchi et al.
patent: 6100961 (2000-08-01), Shiraishi et al.
patent: 6104535 (2000-08-01), Tanaka
patent: 6136632 (2000-10-01), Higashi
patent: 6137633 (2000-10-01), Tanaka
patent: 6157492 (2000-12-01), Yamazaki et al.
patent: 6159777 (2000-12-01), Takenouchi et al.
patent: 6160827 (2000-12-01), Tanaka
patent: 6168968 (2001-01-01), Umemoto et al.
patent: 6172820 (2001-01-01), Kuwahara
patent: 6176926 (2001-01-01), Tanaka
patent: 6184490 (2001-02-01), Schweizer
patent: 6212012 (2001-04-01), Tanaka
patent: 6215595 (2001-04-01), Yamazaki et al.
patent: 6239913 (2001-05-01), Tanaka
patent: 6246524 (2001-06-01), Tanaka
patent: 6249385 (2001-06-01), Yamazaki et al.
patent: 6259512 (2001-07-01), Mizouchi
patent: 6261856 (2001-07-01), Shinohara et al.
patent: 6291320 (2001-09-01), Yamazaki et al.
patent: 6300176 (2001-10-01), Zhang et al.
patent: 6300594 (2001-10-01), Kinoshita et al.
patent: 6304385 (2001-10-01), Tanaka
patent: 6323937 (2001-11-01), Sano
patent: 6353218 (2002-03-01), Yamazaki et al.
patent: 6353244 (2002-03-01), Yamazaki et al.
patent: 6372039 (2002-04-01), Okumura et al.
patent: 6388386 (2002-05-01), Kunii et al.
patent: 6392810 (2002-05-01), Tanaka
patent: 6429100 (2002-08-01), Yoneda
patent: 6437313 (2002-08-01), Yamazaki et al.
patent: 6507446 (2003-01-01), Yamashita et al.
patent: 6521492 (2003-02-01), Miyasaka et al.
patent: 6528397 (2003-03-01), Taketomi et al.
patent: 2001/0015854 (2001-08-01), Yamazaki et al.
patent: 2002/0117630 (2002-08-01), Yamazaki et al.
patent: 2002/0146873 (2002-10-01), Tanaka
patent: 2003/0040146 (2003-02-01), Kang et al.
patent: 2003/0042430 (2003-03-01), Tanaka et al.
patent: 4004423 (1990-08-01), None
patent: 0 653 720 (1995-05-01), None
patent: 2228344 (1990-08-01), None
patent: 60-005578 (1985-01-01), None
patent: 03-226392 (1991-10-01), None
patent: 6-244104 (1994-09-01), None
patent: 7-130652 (1995-05-01), None
patent: 11-054426 (1999-02-01), None
patent: 11-102862 (1999-04-01), None
patent: 11-133463 (1999-05-01), None
Merriam-Websters Collegiate Dictionary Tenth Edition.
Specification, Drawings and Pending Claims of U.S. Appl. No. 09/481,396 entitled Laser Irradiation Apparatus filed Jan. 12, 2000.
Specification, Drawings and Allowed Claims of U.S. Appl. No. 09/843,714 entitled Beam Homogenizer, Laser Irradiation Apparatus, Laser Irradiation Method, and Method of Manufacturing Semiconductor Device filed Apr. 30, 2001.
European Search Report dated Jun. 4, 2002.
European Search Report (Application No. 06014760.0) dated Oct. 30, 2006.

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