Electronic device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C359S290000

Reexamination Certificate

active

10880299

ABSTRACT:
One embodiment of a method of making an electronic device includes forming on a substrate surface a first layer having a peak-valley-peak profile, and forming a second layer on the first layer by use of a target positioned along a line-of-sight that excludes a floor of the valley such that the second layer is not formed on the floor of said peak-valley-peak profile.

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JP10125952, May 15, 1998, Kobayashi Kazuhiro et al.
JP7321181, Dec. 8, 1995, Sekiya Kazuma.

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