Tube particle vacuum cleaner

Details Tube particle vacuum cleaner Tube particle vacuum cleaner

1988-12-02

1990-12-11

Moore, Chris K.

Brushing, scrubbing, and general cleaning

Machines

With air blast or suction

15315, 15395, B08B 902

Patent

active

049760025

ABSTRACT:
The present invention overcomes the aforementioned difficulties by providing a vacuum device to clean the interior surface of particle tubes used in the manufacture of semiconductor wafers. The vacuum device consists of a head which is designed to closely fit with the interior surface of the particle tube to be cleaned. Guide wheels are provided to align the head with the particle tube and to allow the vacuum device to easily roll in and out of the particle tube. The wheels are made of material which does not scratch the interior surface of the particle tube. The head is attached to vacuum tubing by means of flexible bellows. The vacuum tubing and head may be rotated to allow the head to clean the entire interior surface of the particle tube.

REFERENCES:
patent: 1475989 (1923-12-01), Easterday
patent: 1661931 (1928-03-01), Dolan
patent: 1831099 (1931-11-01), Densmore
patent: 1869730 (1932-08-01), Antle
patent: 1994616 (1935-03-01), Leitzell
patent: 2193999 (1940-03-01), Allen
patent: 2251739 (1941-08-01), Huntsinger
patent: 2789296 (1957-04-01), Cheadle

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