Hydrogen peroxide abatement of metal hydride fumes

Details Hydrogen peroxide abatement of metal hydride fumes Hydrogen peroxide abatement of metal hydride fumes

2007-11-13

2007-11-13

Vanoy, Timothy C. (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

C422S105000, C422S111000

Reexamination Certificate

active

10943723

ABSTRACT:
A method and apparatus for reducing the level of metal hydride found in effluent of a process chamber is disclosed. The method includes introducing hydrogen peroxide into the process chamber to react with metal hydride and reduce the level of metal hydride to a level under a permissible exposure limit. Additionally, an apparatus having a process chamber and a vaporizing device for introducing hydrogen peroxide into the process chamber is disclosed.

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