Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices
Reexamination Certificate
2007-04-10
2007-04-10
Dang, Trung (Department: 2823)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Making plural separate devices
C438S114000, C257SE21599, C257SE25012, C257S025000
Reexamination Certificate
active
11079383
ABSTRACT:
In a semiconductor device, in which an insulating layer is disposed on the main face of the silicon substrate, and the insulating layer includes the protruding portion that protrudes from the end face of the silicon substrate, the protruding portion has an interconnect of Cu embedded within the insulating layer.
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patent: 2005/0095750 (2005-05-01), Lo et al.
patent: 62-171137 (1987-07-01), None
patent: 2002-093752 (2002-03-01), None
Dang Trung
NEC Electronics Corporation
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