Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-04-24
2007-04-24
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C438S612000, C438S613000, C438S652000, C336S200000
Reexamination Certificate
active
10707896
ABSTRACT:
A method for manufacturing high performance copper inductors includes providing a tall, Cu laminate spiral inductor is formed at the last metal level, and at the last metal +1 level, with the metal levels being interconnected by a bar via having the same spiral shape as the spiral metal inductors at the last metal level and the last metal +1 level. The method includes integrating the formation of thick inductors with the formation of bond pads, terminals and interconnect wiring with the last metal +1 wiring. Included are dielectric deposition and spacer formation steps, and/or selective deposition of a passivating metal such as CoWP, to passivate a Cu inductor that is formed after the last metal layer.
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Gambino Jeffrey P.
Motsiff William T.
Walton Erick G.
International Business Machines - Corporation
Sabo, Esq. William D.
Scully , Scott, Murphy & Presser, P.C.
Tugbang A. Dexter
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