Method and apparatus for measuring a conductive film at the...

Details Method and apparatus for measuring a conductive film at the... Method and apparatus for measuring a conductive film at the...

2007-07-10

2007-07-10

Aurora, Reena (Department: 2862)

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

Reexamination Certificate

active

11096012

ABSTRACT:
A method of determining a thickness at a thickness position of a conductive film on a substrate with a center zone and an edge zone is disclosed. The method includes providing a set of thickness correlation curves at a set of sensor position radii from a center of the substrate to a position where a sensitivity of an eddy current sensor to the edge zone is greater than zero. The method also includes measuring a set of eddy current responses at a sensor position of the set of sensor position radii. The method further includes correlating the set of eddy current responses to the thickness at the thickness position.

REFERENCES:
patent: 4849694 (1989-07-01), Coates
patent: 6788050 (2004-09-01), Gotkis
Dusharme, “New Trends in Eddy Current Testing,” http://www.qualitydigest.com/dec05/articles/01—article.shtml, pp. 1-7.
Welsby et al., “True Position Measurement with Eddy Current Technology,” Nov. 1997, http://www.sensormag.com/articles/1197/eddy1197/main.shtml, pp. 1-13.
Baumgartner, “FEM Simulation of the Electromagnetic Field in Eddy Current Proximity Sensors,” SENSOR 99; Seonsoren, Messaufnehmer & Systeme,pp. 1-6.
Yang, Chen, “Inductive Eddy Current Sensors for Position/Displacement Measurement and Nanopositioning,” http://www.chenyang-ism.com/ EddyCurrentDistance.htm, 3 pp.

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