Method for adjusting the frequency of a MEMS resonator

Details Method for adjusting the frequency of a MEMS resonator Method for adjusting the frequency of a MEMS resonator

2007-05-22

2007-05-22

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S197000, C333S200000, C333S188000, C324S691000, C324S703000, C438S795000, C438S050000, C438S052000

Reexamination Certificate

active

11490823

ABSTRACT:
There are many inventions described and illustrated herein. These inventions are directed to a method of fabricating a microelectromechanical resonator having an output frequency that may be adjusted, tuned, set, defined and/or selected whether before and/or after final packaging. In one aspect, the method of the present invention adjusts, tunes, sets, defines and/or selects the frequency of the microelectromechanical resonator by changing and/or removing material from the mechanical structure of the resonator by resistively heating (in a selective or non-selective manner) one or more elements and/or beams of the mechanical structure (for example, the moveable or expandable electrodes and/or frequency adjustment structures).

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