Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2007-07-03
2007-07-03
Wilkins, III, Harry D. (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S632000, C204S536000, C205S619000
Reexamination Certificate
active
10313516
ABSTRACT:
The invention relates to apparatus and methods for generating and recycling fluorine. The applicants recognized that a fluorine separator, used either alone or in combination with a plasma generator can produce sufficient quantities of fluorine at its point of use for thin film processing. The fluorine separator can take the form of a condenser, a membrane separation device, a fluorine ion conductor comprising a solid electrolyte, or a combination of the foregoing. In some embodiments, reaction products comprising fluorine are passed to the fluorine separator. In other embodiments, separated fluorine is passed, either alone or in conjunction with additional feed stock comprising fluorine, to a plasma generator. The fluorine separator allows fluorine to be recycled and waste products to be eliminated from the system.
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Besen Matthew M.
Holber William M.
Horne Stephen F.
Smith Donald K.
MKS Instruments Inc.
Proskauer Rose LLP
Wilkins, III Harry D.
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