Lithographic apparatus and patterning device transport

Details Lithographic apparatus and patterning device transport Lithographic apparatus and patterning device transport

2007-07-24

2007-07-24

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000

Reexamination Certificate

active

10874690

ABSTRACT:
A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also includes a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box.

REFERENCES:
patent: 5843196 (1998-12-01), Leavey et al.
patent: 6267123 (2001-07-01), Yoshikawa et al.
patent: 6619903 (2003-09-01), Friedman et al.
patent: 2006/0078407 (2006-04-01), del Puerto et al.

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