Sputtered indium oxide films

Details Sputtered indium oxide films Sputtered indium oxide films

1984-01-31

1986-11-11

Demers, Arthur P.

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419212, 427165, 427166, 428432, 428642, 428699, 428701, C23C 1500

Patent

active

046221204

ABSTRACT:
A method for improving the adhesion of metal to metal oxide films is disclosed, along with improved coated articles produced thereby. The method comprises depositing between a metal and a metal oxide layer a metal containing layer having affinity for both the metal and metal oxide layers . . .

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