Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-01-30
2007-01-30
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S309000, C073S105000
Reexamination Certificate
active
11199290
ABSTRACT:
A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.
REFERENCES:
patent: 5717132 (1998-02-01), Watanabe et al.
Iyoki Masato
Shigeno Masatsugu
Adams & Wilks
SII Nanotechnology Inc.
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