Data processing: generic control systems or specific application – Generic control system – apparatus or process – Digital positioning
Reexamination Certificate
2007-07-24
2007-07-24
Von Buhr, M. N. (Department: 2125)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Digital positioning
C700S114000, C355S053000
Reexamination Certificate
active
10892697
ABSTRACT:
A method and apparatus is provided for determining substrate drift from its nominal or intended position. The apparatus includes at least two fixed reference points. The reference points can be fixed with respect to the processing tool, or with respect to the end effector. As a robotic arm moves the end effector and substrate along a path, a camera captures images of the edge of the substrate and the reference points. Two or more cameras can also be provided. A computer can then calculate positional drift of the substrate, relative to its expected or centered position on the end effector, based upon these readings, and this drift can be corrected in subsequent robotic arm movement.
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Buhr M. N. Von
Knobbe Martens Olson & Bear LLP
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