Exposure apparatus, device manufacturing method, stage...

Details Exposure apparatus, device manufacturing method, stage... Exposure apparatus, device manufacturing method, stage...

2007-07-24

2007-07-24

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S067000

Reexamination Certificate

active

11377282

ABSTRACT:
An exposure apparatus for exposing a substrate to a pattern due to an original includes a substrate stage which holds and moves the substrate, and a first measurement unit which is arranged on the substrate stage, and measures a position of a mark formed on the original by projecting and receiving light.

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