Nanotipped device and method

Details Nanotipped device and method Nanotipped device and method

2007-07-31

2007-07-31

Larkin, Daniel S. (Department: 2856)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C216S002000, C436S180000

Reexamination Certificate

active

10801928

ABSTRACT:
A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout. The working microtip may be used to dispense material onto a substrate, to probe a surface in scanning probe microscopy, to apply an electrical stimulus or record an electrical response on a surface in the presence of a local environment created around the tip by the material dispensed from the tip or to achieve other functions.

REFERENCES:
patent: 7034854 (2006-04-01), Cruchon-Dupeyrat et al.
patent: 2006/0057031 (2006-03-01), Hantschel et al.
de Boer, M. et al., “Micromachining of Buried Channels in Silicon,” J. Microelectromech. 9(1), Mar. 2000, p. 94-103.
Hong, M. et al., “Scanning nanolithography using a material-filled nanopipette,” Appl. Phys. Lett. 77(16), Oct. 2000, p. 2604-2606.
Hong, S. et al., “A Nanoplotter with Both Parallel and Serial Writing Capabilities,” Science 288, Jun. 2000, p. 1808-1811.
Lewis, A. et al., “Fountain pen nanochemistry: Atomic force control of chrome etching,” Appl. Phys. Lett. 75(17), Oct. 1999, p. 2689-2691.
Lieberman, K. et al., “Multifunctional, micropipette based force cantilevers for scanned probe microscopy,” Appl. Phys. Lett. 65(5), Aug. 1994, p. 648-650.
Minne, S. et al., “Automated parallel high-speed atomic force microscopy,” Appl. Phys. Lett. 72(18), May 1998, p. 2340-2342.
Minne, S. et al., “Centimeter scale atomic force microscope imaging and lithography,” Appl. Phys. Lett. 73(12), Sep. 1998, p. 1742-1744.
Papautsky, I. et al., “Micromachined Pipette Arrays,” IEEE Trans. Biomed. Eng. 47(6), p. 812-819.
Piner, R. et al., “Dip-Pen' Nanolithography,” Science 283, Jan. 1999, p. 661-663.
Rangelow, I. et al., “‘NANOJET’: Tool for the nanofabrication,” J. Vac. Sci. Technol. B 19(6), Nov./Dec. 2001, p. 2723-2726.
Shalom, S. et al., “A micropipette force probe suitable for near-field scanning optical microscopy,” Rev. Sci. Instum. 63(9), Sep. 1992, p. 4061-4065.
Vettiger, P. et al., “The ‘Millipede’—More than one thousand tips for future AFM data storage,” IBM J. Res. Devlop. 44(3), May 2000, p. 323-340.
Vettiger, P. et al., “The ‘Millipede’—Nanotechnology Entering Data Storage,” IEEE Trans. on Nanotech. 1(1), Mar. 2002, p. 39-55.
Zhang, M. et al., “A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays,” Nanotechnology 13, 2002, p. 212-217.
Zou, J. et al., “Conductivity-based contact sensing for probe arrays in dip-pen nanolithography,” Appl. Phys. Lette. 83(3), Jul. 2003, p. 581-583.

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