Semiconductor device having a guard ring

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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Details

C257S127000

Reexamination Certificate

active

11120980

ABSTRACT:
A semiconductor device has a guard ring in a multilayer interconnection structure, wherein the guard ring includes a conductive wall extending zigzag in a plane parallel with a principal surface of a substrate.

REFERENCES:
patent: 5674787 (1997-10-01), Zhao et al.
patent: 5817572 (1998-10-01), Chiang et al.
patent: 5834829 (1998-11-01), Dinkel et al.
patent: 6022791 (2000-02-01), Cook et al.
patent: 6163065 (2000-12-01), Seshan et al.
patent: 7-201855 (1995-08-01), None
patent: 10-335456 (1998-12-01), None
patent: 1998-055962 (1998-09-01), None
patent: 1998-082595 (1998-12-01), None
Korean Office Action dated Dec. 15, 2005.

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