Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-01-30
2007-01-30
Vu, David (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C257S127000
Reexamination Certificate
active
11120980
ABSTRACT:
A semiconductor device has a guard ring in a multilayer interconnection structure, wherein the guard ring includes a conductive wall extending zigzag in a plane parallel with a principal surface of a substrate.
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Korean Office Action dated Dec. 15, 2005.
Fujitsu Limited
Vu David
Westerman, Hattori, Daniels & Adrian , LLP.
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