Electrostatic actuator, electrostatic actuator driving...

Details Electrostatic actuator, electrostatic actuator driving... Electrostatic actuator, electrostatic actuator driving...

2007-05-08

2007-05-08

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000, C310S317000, C348S374000, C359S694000, C359S823000

Reexamination Certificate

active

10950449

ABSTRACT:
An electrostatic actuator includes a waveform output register which generates waveform data having a drive time and a drive pattern on the basis of an operation request from the outside and has queues0and1to3holding the waveform data, a waveform data management unit which erases the waveform data held in the queue0of the waveform output register after the drive time has elapsed and moves the waveform data held in the queues1to3to the queue0, an output waveform generation unit which generates a corresponding waveform signal on the basis of the drive pattern held in the queue0of the waveform output register, and a switching circuit which converts the inputted drive pattern into voltage to electrode substrate.

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