Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reissue Patent
2006-12-19
2006-12-19
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S320000, C430S328000, C430S330000
Reissue Patent
active
RE039434
ABSTRACT:
The invention relates to a method of manufacturing a stamper for producing optical disks, comprising the application of a photoresist to a stamper plate and the structuring of the applied photoresist film. The structuring comprises the successive exposure, development and heating of the photoresist film. The developed photoresist film is subjected to an additional exposure in the deep UV range prior to the final heat treatment. The invention also relates to a stamper and to an optical disk obtained using the stamper.
REFERENCES:
patent: 0 667 608 (1995-08-01), None
patent: 2-173285 (1990-07-01), None
patent: 6-302016 (1994-10-01), None
Allen R. et al: “Deep U.V. Hardening or Positive Photoresist Patterns” Journal of the Electrochemical Society, vol. 29, No. 6, Jun. 1982, pp. 1379-1381, XP002047660 see pp. 1379-1380.
Hiraoka & Pacansky: “UV-hardening of Resist Patterns” IBM Technical Disclosure Bulletin, vol. 24, No. 3, Aug. 1981, p. 1468 XP002067935 see p. 1468.
“Photoresist Stabilization System” Solid State Technology, vol. 27, No. 7, Jun. 1984, pp. 45-45, XP002067936 Washington, New York, USA see pp. 45-46.
Engelen Thomas Wilhemus
Stals Walter T. M.
Vermeijlen Jacobus J. T. T.
McPherson John A.
OTB Group B.V.
Pillsbury Winthrop Shaw & Pittman LLP
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