Data processing: generic control systems or specific application – Specific application – apparatus or process – Contest or contestant analysis – management – or monitoring
Reexamination Certificate
2006-08-01
2006-08-01
Gandhi, Jayprakash N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Contest or contestant analysis, management, or monitoring
C700S095000, C700S121000, C714S047300
Reexamination Certificate
active
07085612
ABSTRACT:
A computer-implemented method and system for identifying process steps for purposes of queue-time control and abnormality detection is provided. In one example, the method includes retrieving manufacturing information associated with a fabrication process, where the manufacturing information includes multiple process step pairs. The manufacturing information may be divided into at least a high group and a low group using a statistical clustering method. Values, such as P-values, may then be calculated for each process step pair by applying a non-parametric statistical method to the high and low groups. The process step pairs may be ranked based on their calculated values, and redundant process step pairs may be eliminated. The remaining process step pairs may then be analyzed to identify a particular process step or process step pair.
REFERENCES:
patent: 5665199 (1997-09-01), Sahota et al.
patent: 5880960 (1999-03-01), Lin et al.
patent: 6134482 (2000-10-01), Iwasaki
patent: 6243612 (2001-06-01), Rippenhagen et al.
patent: 6766283 (2004-07-01), Goldman et al.
patent: 2003/0058909 (2003-03-01), Benyon
Chang Chih-Yuan
Hsiao Kuo-Rong
Liu Chia-Chun
Wu Chih-Hung
Gandhi Jayprakash N.
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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