Method and apparatus for capturing fault state data

Details Method and apparatus for capturing fault state data Method and apparatus for capturing fault state data

2006-08-29

2006-08-29

Lindsay, Jr., Walter L. (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C438S016000, C438S017000

Reexamination Certificate

active

07098048

ABSTRACT:
A method includes receiving a fault notification message associated with a fault condition in a manufacturing system. Workpiece identification information is determined for at least one workpiece associated with the fault condition based on the fault notification message. Fault state data is collected based on the workpiece identification information. A fault record including the workpiece identification information and the fault state data is stored. A manufacturing system includes a plurality of tools for processing workpieces, a fault database, and a fault monitor. The fault monitor is configured to receive a fault notification message associated with a fault condition in the manufacturing system, determine workpiece identification information for at least one of the workpieces associated with the fault condition based on the fault notification message, collect fault state data based on the workpiece identification information, and store a fault record including the workpiece identification information and the fault state data in the fault database.

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