Semiconductor device having vertical metal insulator...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S342000, C257S401000

Reexamination Certificate

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06995426

ABSTRACT:
A semiconductor device includes a diffusion area formed in a semiconductor layer of a first conductive type. The diffusion area comprises first and second impurity diffusion areas of the first and second conductive types, respectively. The diffusion area has a first and second areas which are defined by an impurity concentration of the first and second impurity diffusion areas. A junction between the first and second area is formed in a portion in which the first and second impurity diffusion areas overlap each other. A period of the impurity concentration, in a planar direction of the semiconductor layer, of the first or second area is smaller than the maximum width, in the planar direction of the semiconductor layer, of the first and second impurity diffusion areas constituting the first or second area.

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Y. Onishi et al., “24mΩcm2680V Silicon Superjunction Mosfet”, Proc. ISPSD, 2002, pp. 241-244.
U.S. Appl. No. 10/327,937, filed Dec. 26, 2002, Okumura et al.
U.S. Appl. No. 10/403,122, filed Apr. 01, 2003, Yamaguchi et al.

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