Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate
2006-11-14
2006-11-14
Nguyen, Dung Van (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
With indicating
C451S041000
Reexamination Certificate
active
07134934
ABSTRACT:
Methods and apparatuses for detecting characteristics of a microelectronic substrate. A method in accordance with an embodiment of the invention includes positioning the microelectronic substrate proximate to and spaced apart from the first and second spaced apart electrodes, contacting the microelectronic substrate with a polishing surface of a polishing medium, removing conductive material from the microelectronic substrate by moving the substrate and/or the electrodes relative to each other while passing a variable electrical signal through the electrodes and the substrate, and detecting a change in the variable electrical signal or a supplemental electrical signal passing through the microelectronic substrate. The rate at which material is removed from the microelectronic substrate can be changed based at least in part on the change in the electrical signal.
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Lee Whonchee
Meikle Scott G.
Moore Scott E.
Micro)n Technology, Inc.
Nguyen Dung Van
Perkins Coie LLP
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