Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-10-17
2006-10-17
Hamilton, Cynthia (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S326000, C430S270100, C430S287100, C430S286100, C430S281100, C430S285100, C430S288100, C430S275100, C430S945000, C430S914000, C430S921000, C430S922000, C430S925000, C430S330000, C430S272100, C522S015000, C522S025000, C522S031000, C549S059000, C549S078000, C549S080000, C546S347000, C546S348000, C544S398000, C562S110000, C562S101000, C568S034000
Reexamination Certificate
active
07122294
ABSTRACT:
Photoacid generators (PAGs) comprising photoactive moieties and perfluorinated, multifunctional anionic moieties (or incipient anionic moieties) are disclosed which provide photoacids with high acid strength, low volatility and low diffusivity. The present invention further relates to photoacid generators as they are used in photoinitiated or acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.
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Hamilton Cynthia
Kokko Kent S.
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