Coating apparatus – Projection or spray type – With hood or offtake for waste material
Reexamination Certificate
2006-12-26
2006-12-26
Osele, Mark A. (Department: 1734)
Coating apparatus
Projection or spray type
With hood or offtake for waste material
C118S323000, C118S052000, C118S612000
Reexamination Certificate
active
07153364
ABSTRACT:
The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.
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Phan Khoi A.
Quinto Ursula Q.
Rangarajan Bharath
Subramanian Ramkumar
Templeton Michael K.
Advance Micro Devices, Inc.
Amin Turocy & Calvin LLP
Osele Mark A.
Tadesse Yewebdar
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