4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Ursula Q. Quinto

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Chemical feature doubling process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Chemical resist thickness reduction process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Exposure during rework for enhanced resist removal

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Hybrid stack method for patterning source/drain areas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Low defect EBR nozzle

Cleaning and liquid contact with solids – Apparatus – Having self cleaning means
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Profile ID: LFUS-PAI-P-2026251

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