Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1998-04-10
2000-03-07
Kim, Robert H.
Optics: measuring and testing
By polarized light examination
Of surface reflection
3562375, 356446, G01N 2101, G01N 2188
Patent
active
060347767
ABSTRACT:
A microroughness-blind optical scanner focuses p-polarized light onto the rface of a sample. Scattered light is collected through independently rotatable polarizers by one or more collection systems uniformly distributed over a hemispherical shell centered over the sample. The polarizer associated with each collection system is rotated to cancel the corresponding Jones vector thereby preventing detection of microroughness-scattered light, yielding higher sensitivity to particulate defects. The sample is supported on a positioning system permitting the beam to be scanned over the sample surface of interest.
REFERENCES:
patent: 4309110 (1982-01-01), Tumerman
patent: 4376583 (1983-03-01), Alford et al.
patent: 4441124 (1984-04-01), Heebner et al.
patent: 4668860 (1987-05-01), Anthon
patent: 4693602 (1987-09-01), Wyatt et al.
patent: 4740708 (1988-04-01), Batchelder
patent: 4893932 (1990-01-01), Knollenberg
patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 4991971 (1991-02-01), Geary et al.
patent: 5032734 (1991-07-01), Orazio, Jr. et al.
patent: 5046847 (1991-09-01), Nakata et al.
patent: 5245403 (1993-09-01), Kato et al.
patent: 5381233 (1995-01-01), Chao et al.
patent: 5424536 (1995-06-01), Moriya
patent: 5479252 (1995-12-01), Worster et al.
patent: 5486919 (1996-01-01), Tsuji
patent: 5591985 (1997-01-01), Tsuji
patent: 5659390 (1997-08-01), Danko
patent: 5717485 (1998-02-01), Ito et al.
patent: 5726455 (1998-03-01), Vurens
patent: 5748305 (1998-05-01), Shimono et al.
Asmail Clara C.
Germer Thomas A.
Angeli Michael de
Kim Robert H.
Smith Zandra V.
The United States of America as represented by the Secretary of
LandOfFree
Microroughness-blind optical scattering instrument does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microroughness-blind optical scattering instrument, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microroughness-blind optical scattering instrument will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-368308