Thin film transistor and method for manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S066000

Reexamination Certificate

active

07064364

ABSTRACT:
A thin film transistor is provided including a transparent insulating substrate, a lower light shielding film disposed above the transparent insulating substrate, a base interlayer film disposed above the lower light shielding film, a semiconductor film disposed above the base interlayer film, wherein the semiconductor film is formed of polycrystalline silicon. A thin film transistor further comprises roughness formed at an interface between the base interlayer and the semiconductor film, a gate insulating film above the semiconductor film, and a gate electrode above the gate insulating film.

REFERENCES:
patent: 6327006 (2001-12-01), Sato et al.
patent: 4-349637 (1992-12-01), None
patent: 4-367276 (1992-12-01), None
patent: 6-45605 (1994-02-01), None
patent: 10-111520 (1998-04-01), None

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